High Precision Gas Mass Flow Meter

Introduction (Range)

Technical Parameters (Measuring range)

2SCCM~30SLM

50SLM~300SLM

500SLM~3000SLM

Technical Parameters (Accuracy)

± 1.0 % S.P (≥35% F.S)

± 0.35% F.S (<35% F.S)

± 1.0 % S.P (≥35% F.S)

± 0.35% F.S (<35% F.S)

± 0.8% F.S

Technical Parameters (Response time)

<1s

<0.8s

<1s

<0.8s

<1.5s

<0.8s

Technical Parameters (Connector)

Φ3

Φ6

1/8″

1/4″

Φ10

Φ12

3/8″

1/2″

3/4″

Φ2.5

flange

Product model (Serial Number)

AST10-HL thermal low range type mass flow meter

AST10-HB thermal mid-range mass flow meter

AST10-HS thermal large-scale type mass flow meter

Product model (Flow range)

[002C] 2SCCM

[010C] 10SCCM

[030C] 30SCCM

[050C] 50SCCM

[100C] 100SCCM

[200C] 200SCCM

[300C] 300SCCM

[500C] 500SCCM

[001L] 1SLM

[002L] 2SLM

[003L] 3SLM

[005L] 5SLM

[010L] 10SLM

[020L] 20SLM

[030L] 30SLM

[050L] 50SLM

[100L] 100SLM

[200L] 200SLM

[300L] 300SLM

[500L] 500SLM

[1000L] 1000SLM

[2000L] 2000SLM

[3000L] 3000SLM

Product model (Use connector)

[A] Φ3

[B] Φ6

[D] 1/8″

[E] 1/4″

[Y] Others contact the manufacturer

[C] Φ10

[F] Φ12

[Q] 3/8″

[H] 1/2″

[Y] Others contact the manufacturer

[J] 3/4″

[K] Φ25

[L] Flange connection

[Y] Others contact the manufacturer

Product model (Selection examples)

AST10-HL C M N 200C 007 A1 B1 5 8 V B

AST10-HB C M X 050L 007 A1 B1 5 8 V B

AST10- HS V C M X 500 L 007 A1 B1 5 8 V H